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App. No. 09/810,156 · Confirmation No. 3114

SEMICONDUCTOR DEVICE WASHING APPARATUS AND A METHOD OF WASHING A SEMICONDUCTOR DEVICE

Inventor: Hidemitsu Aoki
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2003-12-11 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-03-16 TRNA Transmittal of New Application 4 View
2001-03-16 A.PE Preliminary Amendment 2 View
2001-03-16 SPEC Specification 12 View
2001-03-16 CLM Claims 6 View
2001-03-16 ABST Abstract 1 View
2001-03-16 DRW Drawings-only black and white line drawings 2 View
2001-03-16 OATH Oath or Declaration filed 3 View
2001-03-16 TRNA Transmittal of New Application 4 View
2001-03-16 A.PE Preliminary Amendment 2 View
2001-03-16 SPEC Specification 12 View
2001-03-16 CLM Claims 6 View
2001-03-16 ABST Abstract 1 View
2001-03-16 DRW Drawings-only black and white line drawings 2 View
2001-03-16 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
09/810,156
Filed
2001-03-16
Granted
2004-02-24
Pub. No.
US20010021623A1
Art Unit
3723
PTA
-369 days