IP Library › Granted Patent US 6,352,930
Granted Patent Utility
US 6,352,930 · Confirmation No. 6286

Bilayer anti-reflective coating and etch hard mask

Patented Case View Patent ↗
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 Code Description Pages PDF
2001-03-22 TRNA Transmittal of New Application 3 View
2001-03-22 SPEC Specification 7 View
2001-03-22 CLM Claims 2 View
2001-03-22 ABST Abstract 1 View
2001-03-22 DRW Drawings-only black and white line drawings 2 View
2001-03-22 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,352,930
App. No.
09/814,636
Filed
2001-03-22
Granted
2002-03-05
Art Unit
2813
PTA
-120 days