Patent Application
Utility
App. No. 09/823,637
· Confirmation No. 6930
ENHANCED INSPECTION OF EXTREME ULTRAVIOLET MASK
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-06-21 | SPEC |
Specification | 12 | View | |
| 2001-06-21 | CLM |
Claims | 5 | View | |
| 2001-06-21 | ABST |
Abstract | 1 | View | |
| 2001-03-30 | TRNA |
Transmittal of New Application | 5 | View | |
| 2001-03-30 | SPEC |
Specification | 13 | View | |
| 2001-03-30 | CLM |
Claims | 5 | View | |
| 2001-03-30 | ABST |
Abstract | 1 | View | |
| 2001-03-30 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-03-30 | OATH |
Oath or Declaration filed | 5 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
438/761
B82Y10/00
G03F1/84
B82Y40/00
G03F1/24
Prosecution
- Examiner
- PERKINS, PAMELA E
- Art Unit
- 2822
- Docket No.
- 042390P10063
- Confirmation No.
- 6930
Publication
- Pub. No.
- US20020142620A1
- Pub. Date
- 2002-10-03
Patent Term Adjustment
-93days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-03-30
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Quick Facts
- App. No.
- 09/823,637
- Filed
- 2001-03-30
- Granted
- 2003-06-24
- Pub. No.
- US20020142620A1
- Examiner
- PERKINS, PAMELA E
- Art Unit
- 2822
- PTA
- -93 days
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