Granted Patent
Utility
US 6,720,118
· Confirmation No. 1373
ENHANCED INSPECTION OF EXTREME ULTRAVIOLET MASK
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2005-01-21 | COCOUT |
Certificate of Correction - Post Issue Communication | 1 | View | |
| 2004-06-03 | COCIN |
Request for Certificate of Correction | 3 | View | |
| 2004-02-20 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-11-17 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2003-11-17 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 2 | View | |
| 2003-11-17 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2003-11-17 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-11-17 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2003-11-17 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-11-17 | SPEC |
Specification | 1 | View | |
| 2003-04-25 | TRNA |
Transmittal of New Application | 4 | View | |
| 2003-04-25 | A.PE |
Preliminary Amendment | 5 | View | |
| 2003-04-25 | SPEC |
Specification | 13 | View | |
| 2003-04-25 | CLM |
Claims | 5 | View | |
| 2003-04-25 | ABST |
Abstract | 1 | View | |
| 2003-04-25 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2003-04-25 | OATH |
Oath or Declaration filed | 5 | View | |
| 2003-04-25 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-04-25 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-04-25 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
430/5
B82Y10/00
G03F1/84
B82Y40/00
G03F1/24
Prosecution
- Examiner
- ROSASCO, STEPHEN D
- Art Unit
- 1756
- Docket No.
- 042390P10063D
- Confirmation No.
- 1373
Publication
- Pub. No.
- US20030203289A1
- Pub. Date
- 2003-10-30
Patent Term Adjustment
-3days
from
INTEL CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2016-02-08
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Quick Facts
- Patent No.
- US 6,720,118
- App. No.
- 10/423,733
- Filed
- 2003-04-25
- Granted
- 2004-04-13
- Pub. No.
- US20030203289A1
- Examiner
- ROSASCO, STEPHEN D
- Art Unit
- 1756
- PTA
- -3 days
External Links