IP Library › Granted Patent US 6,472,334
Granted Patent Utility
US 6,472,334 · Confirmation No. 9303

FILM FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND SEMICONDUCTOR DEVICE

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2012-02-02 PET.AUTO ePetition Request Form 3 View
2012-02-02 WFEE Fee Worksheet (SB06) 2 View
2012-02-02 PET.DEC.AUTO ePetition Grant Letter 1 View
2012-02-02 N417 Electronic Filing System Acknowledgment Receipt 2 View
2001-04-03 TRNA Transmittal of New Application 3 View
2001-04-03 A.PE Preliminary Amendment 2 View
2001-04-03 SPEC Specification 25 View
2001-04-03 CLM Claims 3 View
2001-04-03 ABST Abstract 1 View
2001-04-03 DRW Drawings-only black and white line drawings 4 View
2001-04-03 OATH Oath or Declaration filed 4 View
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Quick Facts
Patent No.
US 6,472,334
App. No.
09/824,106
Filed
2001-04-03
Granted
2002-10-29
Pub. No.
US20010041458A1
Art Unit
2829
PTA
-61 days