IP Library Granted Patent US 6,497,799
Granted Patent Utility
US 6,497,799 · Confirmation No. 9921

METHOD AND APPARATUS FOR SPUTTER DEPOSITION OF MULTILAYER FILMS

Inventor: Paul S. McLeod
Patented Case View Patent ↗
⬇ PDF
Code Description Pages PDF
2001-04-11 TRNA Transmittal of New Application 3 View
2001-04-11 SPEC Specification 20 View
2001-04-11 CLM Claims 7 View
2001-04-11 ABST Abstract 1 View
2001-04-11 DRW Drawings-only black and white line drawings 3 View
2001-04-11 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,497,799
App. No.
09/832,115
Filed
2001-04-11
Granted
2002-12-24
Art Unit
1753
PTA
-57 days