Patent Application
Utility
App. No. 09/835,359
· Confirmation No. 5769
APPARATUS FOR PROCESSING SEMICONDUTOR WAFERS
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-08-05 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-04-17 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-04-17 | SPEC |
Specification | 21 | View | |
| 2001-04-17 | CLM |
Claims | 3 | View | |
| 2001-04-17 | ABST |
Abstract | 1 | View | |
| 2001-04-17 | DRW |
Drawings-only black and white line drawings | 11 | View | |
| 2001-04-17 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Kan Yasui
Tokyo, JAPAN
Shigeo Moriyama
Tokyo, JAPAN
Katsuhiko Yamaguchi
Tokyo, JAPAN
Yoshio Homma
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
451/285
Prosecution
- Examiner
- MORGAN, EILEEN P
- Art Unit
- 3723
- Customer No.
- 20457
- Docket No.
- 501.36889VX1
- Confirmation No.
- 5769
Publication
- Pub. No.
- US20010022214A1
- Pub. Date
- 2001-09-20
Patent Term Adjustment
-31days
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Quick Facts
- App. No.
- 09/835,359
- Filed
- 2001-04-17
- Granted
- 2004-01-13
- Pub. No.
- US20010022214A1
- Examiner
- MORGAN, EILEEN P
- Art Unit
- 3723
- PTA
- -31 days
External Links