IP Library › Granted Patent US 6,420,224
Granted Patent Utility
US 6,420,224 · Confirmation No. 8133

STEPPER ALIGNMENT MARK FORMATION WITH DUAL FIELD OXIDE PROCESS

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 Code Description Pages PDF
2001-04-16 TRNA Transmittal of New Application 4 View
2001-04-16 SPEC Specification 7 View
2001-04-16 CLM Claims 5 View
2001-04-16 ABST Abstract 1 View
2001-04-16 DRW Drawings-only black and white line drawings 5 View
2001-04-16 OATH Oath or Declaration filed 6 View
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Quick Facts
Patent No.
US 6,420,224
App. No.
09/836,064
Filed
2001-04-16
Granted
2002-07-16
Pub. No.
US20010022405A1
Examiner
PHAM, HOAI V
Art Unit
2814
PTA
0 days