Granted Patent
Utility
US 6,491,569
· Confirmation No. 1241
METHOD AND APPARATUS FOR USING OPTICAL REFLECTION DATA TO OBTAIN A CONTINUOUS PREDICTIVE SIGNAL DURING CMP
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-04-19 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-04-19 | SPEC |
Specification | 18 | View | |
| 2001-04-19 | CLM |
Claims | 4 | View | |
| 2001-04-19 | ABST |
Abstract | 1 | View | |
| 2001-04-19 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2001-04-19 | OATH |
Oath or Declaration filed | 8 | View |
Inventors
Thomas Frederick Allen Bibby JR.
St. Albans, VT
John A. Adams
Escondido, CA
Attorneys & Agents of Record
Classification
USPC
451/6
Prosecution
- Examiner
- NGUYEN, DUNG V
- Art Unit
- 3723
- Docket No.
- 50001.39US01
- Confirmation No.
- 1241
Publication
- Pub. No.
- US20020155788A1
- Pub. Date
- 2002-10-24
Patent Term Adjustment
-44days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2007-09-28
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Quick Facts
- Patent No.
- US 6,491,569
- App. No.
- 09/838,980
- Filed
- 2001-04-19
- Granted
- 2002-12-10
- Pub. No.
- US20020155788A1
- Examiner
- NGUYEN, DUNG V
- Art Unit
- 3723
- PTA
- -44 days
External Links