IP Library Patent Application 09839162
Patent Application Utility
App. No. 09/839,162 · Confirmation No. 6781

METHOD FOR MANUFACTORING A SHILED FOR AN INDUCTIVELY-COUPLE PLASMA APPARATUS

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
Code Description Pages PDF
2001-04-23 TRNA Transmittal of New Application 4 View
2001-04-23 A.PE Preliminary Amendment 2 View
2001-04-23 SPEC Specification 12 View
2001-04-23 CLM Claims 5 View
2001-04-23 ABST Abstract 1 View
2001-04-23 DRW Drawings-only black and white line drawings 8 View
2001-04-23 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
09/839,162
Filed
2001-04-23
Granted
2003-07-01
Pub. No.
US20010022157A1
Art Unit
1763
PTA
0 days