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App. No. 09/839,615 · Confirmation No. 2450

Correcting the system polarization sensitivity of a metrology tool having a rotatable polarizer

Expressly Abandoned -- During Examination
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 Code Description Pages PDF
2001-04-20 TRNA Transmittal of New Application 1 View
2001-04-20 SPEC Specification 8 View
2001-04-20 CLM Claims 4 View
2001-04-20 ABST Abstract 1 View
2001-04-20 DRW Drawings-only black and white line drawings 3 View
2001-04-20 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
09/839,615
Filed
2001-04-20
Art Unit
2877