Granted Patent
Utility
US 6,522,406
· Confirmation No. 2733
CORRECTING THE SYSTEM POLARIZATION SENSITIVITY OF A METROLOGY TOOL HAVING A ROTATABLE POLARIZER
Patented Case
View Patent ↗
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-06-07 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-06-07 | A.PE |
Preliminary Amendment | 1 | View | |
| 2001-06-07 | SPEC |
Specification | 8 | View | |
| 2001-06-07 | CLM |
Claims | 4 | View | |
| 2001-06-07 | ABST |
Abstract | 1 | View | |
| 2001-06-07 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-06-07 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Pablo I. Rovira
San Francisco, CA
Richard A. Yarussi
San Francisco, CO
James M. Holden
San Jose, CA
Roger R. Lowe-Webb
Mountain View, CA
Attorneys & Agents of Record
Classification
USPC
356/369
Prosecution
- Examiner
- SMITH, ZANDRA V
- Art Unit
- 2877
- Customer No.
- 34036
- Docket No.
- M-9969-1C US
- Confirmation No.
- 2733
Patent Term Adjustment
0days
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- Patent No.
- US 6,522,406
- App. No.
- 09/877,363
- Filed
- 2001-06-07
- Granted
- 2003-02-18
- Examiner
- SMITH, ZANDRA V
- Art Unit
- 2877
- PTA
- 0 days
External Links