IP Library Granted Patent US 6,768,628
Granted Patent Utility
US 6,768,628 · Confirmation No. 1249

METHOD FOR FABRICATING AN ISOLATED MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICE INCORPORATING A WAFER LEVEL CAP

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2004-04-09 CTAV Advisory Action (PTOL-303) 2 View
2004-04-09 1449 List of References cited by applicant and considered by examiner 5 View
2004-04-09 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-03-22 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-03-09 RUSH Printer Query form, used by the publications branch 6 View
2004-01-15 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-01-15 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-01-15 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-01-15 SRFW Search information including classification, databases and other search related notes 1 View
2004-01-06 WFEE Fee Worksheet (SB06) 1 View
2004-01-06 FWCLM Index of Claims 1 View
2003-12-16 RCEX Request for Continued Examination (RCE) 1 View
2003-12-16 LET. Miscellaneous Incoming Letter 1 View
2003-10-22 CTAV Advisory Action (PTOL-303) 3 View
2003-10-08 WFEE Fee Worksheet (SB06) 1 View
2003-10-08 FWCLM Index of Claims 1 View
2003-09-15 A.NE Response After Final Action 1 View
2003-09-15 CLM Claims 12 View
2003-09-15 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-07-10 CTFR Final Rejection 29 View
2003-07-10 892 List of references cited by examiner 1 View
2003-05-01 IDS Information Disclosure Statement (IDS) Form (SB08) 6 View
2003-05-01 FOR Foreign Reference 34 View
2003-05-01 FOR Foreign Reference 23 View
2003-05-01 FOR Foreign Reference 25 View
2003-03-24 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-03-24 CLM Claims 10 View
2003-03-24 REM Applicant Arguments/Remarks Made in an Amendment 19 View
2003-03-24 LET. Miscellaneous Incoming Letter 1 View
2002-12-19 CTNF Non-Final Rejection 15 View
2002-12-19 892 List of references cited by examiner 1 View
2002-12-19 1449 List of References cited by applicant and considered by examiner 3 View
2002-12-07 SRNT Examiner's search strategy and results 1 View
2002-09-23 ELC. Response to Election / Restriction Filed 1 View
2002-09-23 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2002-08-23 CTRS Requirement for Restriction/Election 4 View
2002-04-12 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-02-04 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2001-04-26 TRNA Transmittal of New Application 2 View
2001-04-26 SPEC Specification 12 View
2001-04-26 CLM Claims 6 View
2001-04-26 ABST Abstract 1 View
2001-04-26 DRW Drawings-only black and white line drawings 4 View
2001-04-26 OATH Oath or Declaration filed 3 View
2001-04-26 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-04-26 SRFW Search information including classification, databases and other search related notes 1 View
2001-04-26 FWCLM Index of Claims 1 View
2001-04-26 TRNA Transmittal of New Application 2 View
2001-04-26 DRW Drawings-only black and white line drawings 4 View
2001-04-26 SPEC Specification 12 View
2001-04-26 CLM Claims 6 View
2001-04-26 ABST Abstract 1 View
2001-04-26 OATH Oath or Declaration filed 3 View
2001-04-26 WFEE Fee Worksheet (SB06) 1 View
2001-04-26 WFEE Fee Worksheet (SB06) 1 View
2001-04-26 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
Patent No.
US 6,768,628
App. No.
09/842,975
Filed
2001-04-26
Granted
2004-07-27
Pub. No.
US20020159218A1
Art Unit
2831
PTA
-72 days