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App. No. 09/843,545 · Confirmation No. 9246

METHOD FOR FABRICATING AN ISOLATED MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICE USING AN INTERNAL VOID

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2004-05-27 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-03-08 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
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2004-03-08 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2004-03-08 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-02-19 A.NE Response After Final Action 2 View
2004-02-19 CLM Claims 6 View
2004-02-19 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-10-15 CTNF Non-Final Rejection 7 View
2003-10-15 1449 List of References cited by applicant and considered by examiner 1 View
2003-09-15 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-09-15 CLM Claims 7 View
2003-09-15 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2003-08-22 LET. Miscellaneous Incoming Letter 1 View
2003-08-22 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-06-11 CTNF Non-Final Rejection 7 View
2003-06-11 892 List of references cited by examiner 1 View
2003-06-11 1449 List of References cited by applicant and considered by examiner 10 View
2003-06-03 SRNT Examiner's search strategy and results 2 View
2003-05-30 SRNT Examiner's search strategy and results 25 View
2003-04-29 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-04-29 FOR Foreign Reference 35 View
2003-04-29 FOR Foreign Reference 23 View
2003-04-29 FOR Foreign Reference 25 View
2002-04-12 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2002-02-04 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2001-10-01 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2001-04-26 TRNA Transmittal of New Application 2 View
2001-04-26 SPEC Specification 13 View
2001-04-26 CLM Claims 6 View
2001-04-26 ABST Abstract 1 View
2001-04-26 DRW Drawings-only black and white line drawings 5 View
2001-04-26 OATH Oath or Declaration filed 3 View
2001-04-26 TRNA Transmittal of New Application 2 View
2001-04-26 SPEC Specification 13 View
2001-04-26 CLM Claims 6 View
2001-04-26 ABST Abstract 1 View
2001-04-26 DRW Drawings-only black and white line drawings 5 View
2001-04-26 OATH Oath or Declaration filed 3 View
2001-04-26 FWCLM Index of Claims 1 View
2001-04-26 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-04-26 SRFW Search information including classification, databases and other search related notes 1 View
2001-04-26 WFEE Fee Worksheet (SB06) 1 View
2001-04-26 WCLM Claims Worksheet (PTO-2022) 1 View
2001-04-26 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
09/843,545
Filed
2001-04-26
Granted
2004-07-13
Pub. No.
US20020158039A1
Art Unit
1763
PTA
-35 days