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App. No. 09/847,319 · Confirmation No. 5589

METHOD OF RAPID PREVENTION OF PARTICLE POLLUTION IN PRE-CLEAN CHAMBERS

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2001-05-03 TRNA Transmittal of New Application 3 View
2001-05-03 SPEC Specification 4 View
2001-05-03 CLM Claims 2 View
2001-05-03 ABST Abstract 1 View
2001-05-03 DRW Drawings-only black and white line drawings 5 View
2001-05-03 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
09/847,319
Filed
2001-05-03
Granted
2003-02-11
Pub. No.
US20020162569A1
Art Unit
1746
PTA
0 days