IP Library Granted Patent US 6,570,166
Granted Patent Utility
US 6,570,166 · Confirmation No. 6478

OPERATION METHOD OF ION SOURCE AND ION BEAM IRRADIATION APPARATUS

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Code Description Pages PDF
2001-08-27 TRNA Transmittal of New Application 3 View
2001-08-27 DRW Drawings-only black and white line drawings 2 View
2001-05-03 TRNA Transmittal of New Application 3 View
2001-05-03 SPEC Specification 16 View
2001-05-03 CLM Claims 2 View
2001-05-03 ABST Abstract 1 View
2001-05-03 DRW Drawings-only black and white line drawings 2 View
2001-05-03 OATH Oath or Declaration filed 1 View
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Quick Facts
Patent No.
US 6,570,166
App. No.
09/847,404
Filed
2001-05-03
Granted
2003-05-27
Pub. No.
US20020029746A1
Art Unit
2881
PTA
0 days