IP Library › Granted Patent US 6,796,316
Granted Patent Utility
US 6,796,316 · Confirmation No. 7524

ATOMIC LAYER DEPOSITION (ALD) THIN FILM DEPOSITION EQUIPMENT HAVING CLEANING APPARATUS AND CLEANING METHOD

Inventor: Young-Hoon Park
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2015-01-08 IMIS Miscellaneous Internal Document 2 View
2004-09-01 BIB Bibliographic Data Sheet 1 View
2004-08-16 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-05-18 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-18 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-18 892 List of references cited by examiner 1 View
2004-05-18 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-05-18 FWCLM Index of Claims 1 View
2004-05-18 SRFW Search information including classification, databases and other search related notes 1 View
2004-05-16 SRNT Examiner's search strategy and results 5 View
2004-05-13 SRNT Examiner's search strategy and results 3 View
2004-03-15 WFEE Fee Worksheet (SB06) 1 View
2004-03-15 FWCLM Index of Claims 1 View
2004-02-03 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-02-03 CLM Claims 3 View
2004-02-03 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-11-18 CTNF Non-Final Rejection 4 View
2003-11-18 1449 List of References cited by applicant and considered by examiner 3 View
2003-11-18 892 List of references cited by examiner 1 View
2003-11-18 FWCLM Index of Claims 1 View
2003-11-18 SRFW Search information including classification, databases and other search related notes 1 View
2003-11-07 SRNT Examiner's search strategy and results 4 View
2003-08-19 ELC. Response to Election / Restriction Filed 1 View
2003-08-19 CLM Claims 3 View
2003-08-19 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-07-15 CTRS Requirement for Restriction/Election 4 View
2003-02-11 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-04-12 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-04-12 FOR Foreign Reference 5 View
2002-01-24 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2002-01-24 FOR Foreign Reference 9 View
2001-05-03 TRNA Transmittal of New Application 4 View
2001-05-03 A.PE Preliminary Amendment 17 View
2001-05-03 SPEC Specification 21 View
2001-05-03 CLM Claims 6 View
2001-05-03 ABST Abstract 1 View
2001-05-03 DRW Drawings-only black and white line drawings 9 View
2001-05-03 OATH Oath or Declaration filed 4 View
2001-05-03 TRNA Transmittal of New Application 4 View
2001-05-03 A.PE Preliminary Amendment 1 View
2001-05-03 SPEC Specification 1 View
2001-05-03 CLM Claims 6 View
2001-05-03 REM Applicant Arguments/Remarks Made in an Amendment 9 View
2001-05-03 SPEC Specification 21 View
2001-05-03 CLM Claims 6 View
2001-05-03 ABST Abstract 1 View
2001-05-03 DRW Drawings-only black and white line drawings 9 View
2001-05-03 OATH Oath or Declaration filed 4 View
2001-05-03 WFEE Fee Worksheet (SB06) 1 View
2001-05-03 WFEE Fee Worksheet (SB06) 1 View
2001-05-03 WCLM Claims Worksheet (PTO-2022) 1 View
2001-05-03 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-05-03 FWCLM Index of Claims 1 View
2001-05-03 FRPR Certified Copy of Foreign Priority Application 59 View
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Quick Facts
Patent No.
US 6,796,316
App. No.
09/848,533
Filed
2001-05-03
Granted
2004-09-28
Pub. No.
US20020007790A1
Art Unit
1746
PTA
0 days