Granted Patent
Utility
US 6,355,400
· Confirmation No. 1517
Resist pattern forming method using anti-reflective layer, resist pattern formed, and method of etching using resist pattern and product formed
Patented Case
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-08-20 | TRNA |
Transmittal of New Application | 4 | View | |
| 2001-08-20 | ABST |
Abstract | 1 | View | |
| 2001-05-07 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-05-07 | A.PE |
Preliminary Amendment | 4 | View | |
| 2001-05-07 | SPEC |
Specification | 72 | View | |
| 2001-05-07 | CLM |
Claims | 2 | View | |
| 2001-05-07 | ABST |
Abstract | 1 | View | |
| 2001-05-07 | DRW |
Drawings-only black and white line drawings | 22 | View | |
| 2001-05-07 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
430/313
H10P76/00
G03F7/091
Y10S430/151
Prosecution
- Examiner
- YOUNG, CHRISTOPHER G
- Art Unit
- 1756
- Customer No.
- 20457
- Docket No.
- 501.34032CC6
- Confirmation No.
- 1517
Foreign Priority
7-030425
·
1995-02-20
·
JAPAN
7-033313
·
1995-02-22
·
JAPAN
7-122150
·
1995-05-22
·
JAPAN
Patent Term Adjustment
0days
Parent
is a Continuation of
→
App. 09/664,554
· US 6,255,036
Filed 2000-09-18
· Patented Case
Parent
is a Continuation of
→
App. 09/440,111
· US 6,162,588
Filed 1999-11-15
· Patented Case
Parent
is a Continuation of
→
App. 09/285,010
· US 5,985,517
Filed 1999-04-01
· Patented Case
Parent
is a Continuation of
→
App. 09/159,786
· US 5,935,765
Filed 1998-09-24
· Patented Case
Parent
is a Continuation of
→
App. 09/021,186
· US 5,846,693
Filed 1998-02-10
· Patented Case
Parent
is a Continuation of
→
App. 08/601,361
· US 5,733,712
Filed 1996-02-16
· Patented Case
Child
is a Continuation of
→
App. 10/229,216
· US 6,555,295
Filed 2002-08-28
· Patented Case
Child
is a Continuation of
→
App. 10/054,932
· US 6,461,776
Filed 2002-01-25
· Patented Case
from
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ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2011-03-25
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Quick Facts
- Patent No.
- US 6,355,400
- App. No.
- 09/849,487
- Filed
- 2001-05-07
- Granted
- 2002-03-12
- Examiner
- YOUNG, CHRISTOPHER G
- Art Unit
- 1756
- PTA
- 0 days
External Links