Granted Patent
Utility
US 6,561,878
· Confirmation No. 8449
METHODS AND APPARATUSES FOR MECHANICAL AND CHEMICAL-MECHANICAL PLANARIZATION OF MICROELECTRONIC-DEVICE SUBSTRATE ASSEMBLIES ON PLANARIZING PADS
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-05-11 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-05-11 | ADS |
Application Data Sheet | 2 | View | |
| 2001-05-11 | A.PE |
Preliminary Amendment | 3 | View | |
| 2001-05-11 | SPEC |
Specification | 17 | View | |
| 2001-05-11 | CLM |
Claims | 19 | View | |
| 2001-05-11 | ABST |
Abstract | 1 | View | |
| 2001-05-11 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2001-05-11 | OATH |
Oath or Declaration filed | 11 | View |
Inventors
Dinesh Chopra
Boise, ID
Scott G. Meikle
Boise, ID
Attorneys & Agents of Record
Classification
USPC
451/56
B24B37/04
H10P52/403
B24B57/02
Prosecution
- Examiner
- HONG, WILLIAM
- Art Unit
- 3725
- Customer No.
- 27076
- Docket No.
- 500077.03
- Confirmation No.
- 8449
Publication
- Pub. No.
- US20010018318A1
- Pub. Date
- 2001-08-30
Patent Term Adjustment
-121days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-04
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- Patent No.
- US 6,561,878
- App. No.
- 09/854,282
- Filed
- 2001-05-11
- Granted
- 2003-05-13
- Pub. No.
- US20010018318A1
- Examiner
- HONG, WILLIAM
- Art Unit
- 3725
- PTA
- -121 days
External Links