Granted Patent
Utility
US 6,342,426
· Confirmation No. 8832
Method for protecting stepper alignment marks
Patented Case
View Patent ↗
Inventors
Kam-Tung Li
Hsinchu Hsien, TAIWAN
Chung-Chih Yeh
Chiayi Hsien, TAIWAN
Attorneys & Agents of Record
Classification
USPC
438/401
G03F9/7076
H10W46/501
H10W46/301
H10W46/503
H10W46/00
Prosecution
- Examiner
- ZARNEKE, DAVID A
- Art Unit
- 2812
- Docket No.
- 3158/0J320
- Confirmation No.
- 8832
Foreign Priority
90102800
·
2001-02-08
·
TAIWAN
Patent Term Adjustment
0days
No related applications found.
from
MOSEL VITELIC, INC.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-05-24
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-05-10
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Quick Facts
- Patent No.
- US 6,342,426
- App. No.
- 09/854,952
- Filed
- 2001-05-10
- Granted
- 2002-01-29
- Examiner
- ZARNEKE, DAVID A
- Art Unit
- 2812
- PTA
- 0 days
External Links