Granted Patent
Utility
US 6,645,883
· Confirmation No. 9501
FILM FORMING METHOD, SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-09-15 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-05-24 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-05-24 | SPEC |
Specification | 22 | View | |
| 2001-05-24 | CLM |
Claims | 4 | View | |
| 2001-05-24 | ABST |
Abstract | 1 | View | |
| 2001-05-24 | DRW |
Drawings-only black and white line drawings | 10 | View | |
| 2001-05-24 | OATH |
Oath or Declaration filed | 5 | View |
Inventors
Youichi Yamamoto
Tokyo, JAPAN
Hiroshi Ikakura
Tokyo, JAPAN
Tomomi Suzuki
Tokyo, JAPAN
Yuichiro Kotake
Tokyo, JAPAN
Yoshimi Shioya
Tokyo, JAPAN
Kouichi Ohira
Tokyo, JAPAN
Shoji Ohgawara
Tokyo, JAPAN
Kazuo Maeda
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/788
H10P14/6922
C23C16/401
H10P14/6686
H10P14/6336
Prosecution
- Examiner
- GHYKA, ALEXANDER G
- Art Unit
- 2812
- Customer No.
- 30132
- Confirmation No.
- 9501
Foreign Priority
2000-188287
·
2000-06-22
·
JAPAN
Publication
- Pub. No.
- US20020013068A1
- Pub. Date
- 2002-01-31
Patent Term Adjustment
-59days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2012-06-29
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2012-06-29
from
IKAKURA, HIROSHI,
KOTAKE, YUICHIRO,
MAEDA, KAZUO,
OHGAWARA, SHOJI,
OHIRA, KOUICHI,
SHIOYA, YOSHIMI,
SUZUKI, TOMOMI,
YAMAMOTO, YOUICHI
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-05-24
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- Patent No.
- US 6,645,883
- App. No.
- 09/863,382
- Filed
- 2001-05-24
- Granted
- 2003-11-11
- Pub. No.
- US20020013068A1
- Examiner
- GHYKA, ALEXANDER G
- Art Unit
- 2812
- PTA
- -59 days
External Links