IP Library › Granted Patent US 6,580,515
Granted Patent Utility
US 6,580,515 · Confirmation No. 8288

SURFACE PROFILING USING A DIFFERENTIAL INTERFEROMETER

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 Code Description Pages PDF
2001-05-29 TRNA Transmittal of New Application 2 View
2001-05-29 SPEC Specification 23 View
2001-05-29 CLM Claims 11 View
2001-05-29 ABST Abstract 1 View
2001-05-29 DRW Drawings-only black and white line drawings 11 View
2001-05-29 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,580,515
App. No.
09/870,350
Filed
2001-05-29
Granted
2003-06-17
Art Unit
2882
PTA
-62 days