IP Library › Patent Application 09873076
Patent Application Utility Small
App. No. 09/873,076 · Confirmation No. 3963

WAFER LEVEL METHOD FOR PROBING MICROMECHANICAL DEVICES

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2007-10-04 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2001-05-31 TRNA Transmittal of New Application 2 View
2001-05-31 ADS Application Data Sheet 2 View
2001-05-31 SPEC Specification 6 View
2001-05-31 CLM Claims 3 View
2001-05-31 ABST Abstract 1 View
2001-05-31 DRW Drawings-only black and white line drawings 6 View
2001-05-31 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
09/873,076
Filed
2001-05-31
Granted
2003-07-15
Pub. No.
US20020180452A1
Examiner
HE, AMY
Art Unit
2858
PTA
-29 days