Granted Patent
Utility
US 6,481,004
· Confirmation No. 3146
CIRCUIT PATTERN DESIGN METHOD,EXPOSURE METHOD, CHARGED-PARTICLE BEAM EXPOSURE SYSTEM
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-06-12 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-06-12 | SPEC |
Specification | 28 | View | |
| 2001-06-12 | CLM |
Claims | 6 | View | |
| 2001-06-12 | ABST |
Abstract | 1 | View | |
| 2001-06-12 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2001-06-12 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Ryoichi Inanami
Kawasaki-shi, JAPAN
Shunko Magoshi
Yokohama-shi, JAPAN
Attorneys & Agents of Record
Classification
USPC
716/21
Prosecution
- Examiner
- HO, TU TU V
- Art Unit
- 2818
- Customer No.
- 22852
- Docket No.
- 04329.2579
- Confirmation No.
- 3146
Foreign Priority
2000-177307
·
2000-06-13
·
JAPAN
Publication
- Pub. No.
- US20020010906A1
- Pub. Date
- 2002-01-24
Patent Term Adjustment
-46days
No related applications found.
from
TOSHIBA CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2013-01-29
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-06-12
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Quick Facts
- Patent No.
- US 6,481,004
- App. No.
- 09/878,286
- Filed
- 2001-06-12
- Granted
- 2002-11-12
- Pub. No.
- US20020010906A1
- Examiner
- HO, TU TU V
- Art Unit
- 2818
- PTA
- -46 days
External Links