IP Library › Granted Patent US 6,577,443
Granted Patent Utility
US 6,577,443 · Confirmation No. 4505

REDUCTION OBJECTIVE FOR EXTREME ULTRAVIOLET LITHOGRAPHY

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 Code Description Pages PDF
2001-06-11 TRNA Transmittal of New Application 4 View
2001-06-11 SPEC Specification 25 View
2001-06-11 CLM Claims 3 View
2001-06-11 ABST Abstract 1 View
2001-06-11 DRW Drawings-only black and white line drawings 8 View
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Quick Facts
Patent No.
US 6,577,443
App. No.
09/878,697
Filed
2001-06-11
Granted
2003-06-10
Pub. No.
US20020114089A1
Art Unit
2872
PTA
-117 days