IP Library Granted Patent US 6,555,167
Granted Patent Utility
US 6,555,167 · Confirmation No. 7941

METHOD FOR GROWING HIGH QUALITY GROUP-III NITRIDE THIN FILM BY METAL ORGANIC CHEMICAL VAPOR DEPOSITION

⬇ PDF
Code Description Pages PDF
2001-06-18 TRNA Transmittal of New Application 3 View
2001-06-18 ADS Application Data Sheet 4 View
2001-06-18 SPEC Specification 5 View
2001-06-18 CLM Claims 1 View
2001-06-18 ABST Abstract 1 View
2001-06-18 DRW Drawings-only black and white line drawings 4 View
2001-06-18 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
Patent No.
US 6,555,167
App. No.
09/881,711
Filed
2001-06-18
Granted
2003-04-29
Pub. No.
US20020192373A1
Art Unit
1762
PTA
-63 days