IP Library Granted Patent US 6,524,168
Granted Patent Utility
US 6,524,168 · Confirmation No. 8923

COMPOSITION AND METHOD FOR POLISHING SEMICONDUCTORS

Inventors: Qiuliang Luo, James Shen
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Code Description Pages PDF
2006-07-17 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2001-06-15 TRNA Transmittal of New Application 1 View
2001-06-15 SPEC Specification 5 View
2001-06-15 CLM Claims 2 View
2001-06-15 ABST Abstract 1 View
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Quick Facts
Patent No.
US 6,524,168
App. No.
09/882,453
Filed
2001-06-15
Granted
2003-02-25
Pub. No.
US20020043026A1
Art Unit
3723
PTA
0 days