Granted Patent
Utility
US 6,492,248
· Confirmation No. 9470
FEW-PARTICLE-INDUCED LOW-PRESSURE TEOS PROCESS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-06-26 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-06-26 | SPEC |
Specification | 11 | View | |
| 2001-06-26 | CLM |
Claims | 4 | View | |
| 2001-06-26 | ABST |
Abstract | 1 | View | |
| 2001-06-26 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2001-06-26 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Jen Chieh Chang
Taipei, TAIWAN
Yi Fu Chung
Dung Chiu, TAIWAN
Ching-Cheng Hsieh
Taoyuan, TAIWAN
Pei-Feng Sun
Kaohsiung, TAIWAN
Attorneys & Agents of Record
Classification
USPC
438/484
H10P14/69215
C23C16/402
H10P14/6334
H10P14/6529
Prosecution
- Examiner
- LUU, PHO M
- Art Unit
- 2824
- Customer No.
- 23364
- Docket No.
- CHAN3092/EM/6938
- Confirmation No.
- 9470
Foreign Priority
89123890
·
2000-11-10
·
TAIWAN
Publication
- Pub. No.
- US20020058398A1
- Pub. Date
- 2002-05-16
Patent Term Adjustment
-57days
No related applications found.
from
MOSEL VITELIC, INC.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-05-24
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-06-26
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Quick Facts
- Patent No.
- US 6,492,248
- App. No.
- 09/888,398
- Filed
- 2001-06-26
- Granted
- 2002-12-10
- Pub. No.
- US20020058398A1
- Examiner
- LUU, PHO M
- Art Unit
- 2824
- PTA
- -57 days
External Links