Patent Application
Utility
App. No. 09/888,923
· Confirmation No. 9726
MAGNETRON SPUTTERING SOURCE
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-06-25 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-06-25 | A.PE |
Preliminary Amendment | 11 | View | |
| 2001-06-25 | SPEC |
Specification | 29 | View | |
| 2001-06-25 | CLM |
Claims | 8 | View | |
| 2001-06-25 | ABST |
Abstract | 1 | View | |
| 2001-06-25 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2001-06-25 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Walter Haag
Grabs, SWITZERLAND
Pius Grunenfelder
Wangs, SWITZERLAND
Urs Schwendener
Buchs, SWITZERLAND
Markus Schlegel
Azmoos, SWITZERLAND
Siegfried Krassnitzer
Feldkirch, AUSTRIA
Attorneys & Agents of Record
Classification
USPC
204/298.12
H01J37/34
H01J37/3408
C23C14/35
H01J37/3452
H01J2237/3325
Prosecution
- Examiner
- DIAMOND, ALAN D
- Art Unit
- 1753
- Docket No.
- H60-065 DIV2
- Confirmation No.
- 9726
Foreign Priority
2897/97
·
1997-12-17
·
SWITZERLAND
Publication
- Pub. No.
- US20020036133A1
- Pub. Date
- 2002-03-28
Patent Term Adjustment
-101days
Parent
is a Division of
→
App. 09/587,543
· US 6,284,106
Filed 2000-06-05
· Patented Case
Parent
is a Division of
→
App. 09/026,446
· US 6,093,293
Filed 1998-02-19
· Patented Case
Child
is a Continuation in-part of
→
App. 10/236,636
· US 6,679,977
Filed 2002-09-06
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2011-02-02
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Quick Facts
- App. No.
- 09/888,923
- Filed
- 2001-06-25
- Granted
- 2002-09-24
- Pub. No.
- US20020036133A1
- Examiner
- DIAMOND, ALAN D
- Art Unit
- 1753
- PTA
- -101 days
External Links