Patent Assignment
Reel/Frame 031029/0927
Change of Name
Recorded: 2013-08-16
Pages: 6
Assignor
OERLIKON SOLAR AG, TRUBBACH
Executed: 2012-12-07
Assignee
TEL SOLAR AG
HAUPTSTRASSE 1A, TRUBBACH, 9477, SWITZERLAND
Covered Properties
(54)
Method for a Reactive Surface Treatment of a Workpiece and a Treatment Chamber for Practicing Such Method
Patent:
5,422,139 →
Application:
08/067,392 →
Plasma Generating Device
Patent:
5,399,253 →
Application:
08/153,608 →
Method for Improving the Rate of a Plasma Enhanced Vacuum Treatment
Patent:
5,693,238 →
Application:
08/237,432 →
Plasma Treatment Apparatus and Method for Operating Same
Patent:
5,515,986 →
Application:
08/237,575 →
Field Emission Device
Patent:
5,789,851 →
Application:
08/573,257 →
Heating System, Vacuum Process Chamber Comprising Such a Heating System and Operation of Such a Vacuum Process Chamber
Patent:
5,852,275 →
Application:
08/576,236 →
Vacuum Apparatus for the Surface Treatment of Workpieces
Patent:
5,655,277 →
Application:
08/693,987 →
Method for Monitoring the Flow of a Gas into a Vacuum Reactor
Patent:
6,074,691 →
Application:
08/881,759 →
Magnetron Sputtering Source
Patent:
6,093,293 →
Application:
09/026,446 →
Process for Dry Etching and Vacuum Treatment Reactor
Patent:
6,127,271 →
Application:
09/066,978 →
Plasma Treatment Apparatus and Method for Operation Same
Patent:
6,296,735 →
Application:
09/177,894 →
Capacitively Coupled Rf-Plasma Reactor
Patent:
6,281,469 →
Application:
09/360,247 →
Method for Improving the Rate of a Plasma Enhanced Vacuum Treatment
Plasma Reactor Forthe Treatment of Large Size Subtrates
Patent:
6,228,438 →
Application:
09/401,158 →
Process for Handling Workpieces and Apparatus Therefor
Patent:
6,177,129 →
Application:
09/441,373 →
Processes for Vacuum Treating Workpieces, and Corresponding Process Equipment
Patent:
6,391,377 →
Application:
09/441,374 →
Heat Conditioning Process
Patent:
6,513,347 →
Application:
09/481,392 →
Desing of Gas Injection for the Electrode in a Capacitively Coupled Rf Plasma Reactor
Patent:
6,502,530 →
Application:
09/559,408 →
Method of Producing Flat Panels
Patent:
6,284,106 →
Application:
09/587,543 →
Vacuum System with a Vacuum Plate Valve
Patent:
6,427,973 →
Application:
09/632,847 →
Processes for Vacuum Treating Workpieces, and Corresponding Process Equipment
Magnetron Sputtering Source
Plasma Treatment Apparatus and Method for Operating Same
Use of a Method for the Plasma-Supported Reactive Deposition of a Material
Patent:
6,685,994 →
Application:
10/031,258 →
Method of Producing Flat Panels
An Rf Plasma Reactor Having a Distribution Chamber with at Least One Grid
Lifting and Supporting Device
Method for Laser Micromachining
Method for Producing Semi-Conducting Devices and Devices Obtained with This Method
Method for Manufacturing a Plate-Shaped Workpiece
Sliding Anode Magnetron Sputtering Source
Voltage Non-Uniformity Compensation Method for High Frequency Plasma Reactor for the Treatment of Rectangular Large Area Substrates
Diffusion Barrier Layer and Method for Manufacturing a Diffusion Barrier Layer
Solar Cell Module and Method of Encapsulating Same
Adhesion Layer for Thin Film Transistors
Magnetron Sputtering Apparatus
Sputter Target Utilization
Plasma Reactor for the Treatment of Large Size Substrates
Plasma Reactor for the Treatment of Large Size Substrates
Method for Producing Semi-Conducting Devices and Devices Obtained with This Method
Process for Laser Scribing
Inline Vacuum Processing Apparatus and Method for Processing Substrates Therein
Application:
12/040,292 →
Publication:
US 2008/0213477
Method for Laser Scribing of Solar Panels
Test Equipment for Automated Quality Control of Thin Film Solar Modules
Method for Laser Micromachining
Vacuum Treatment Installation for the Production of a Disk-Shaped Workpiece Based on a Dielectric Substrate
Method for Manufacturing a Diffusion Barrier Layer
Application:
12/330,903 →
Publication:
US 2009/0087998
Voltage Non-Uniformity Compensation Method for High Frequency Plasma Reactor for the Treatment of Rectangular Large Area Substrates
Method for Producing Semi-Conducting Devices and Devices Obtained with This Method
Application:
12/361,020 →
Publication:
US 2009/0127673
Method for Manufacturing Flat Substrates
Voltage Non-Uniformity Compensation Method for High Frequency Plasma Reactor for the Treatment of Rectangular Large Area Substrates
Remote Plasma Cleaning Method and Apparatus for Applying Said Method
Application:
13/002,572 →
Publication:
US 2011/0203610
Method for Depositing an Amorphous Silicon Film for Photovoltaic Devices with Reduced Light-Induced Degradation for Improved Stabilized Performance
Large-Area Thin-Film-Silicon Photovoltaic Modules
Application:
13/079,072 →
Publication:
US 2011/0240107
Related Assignments
(25)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Dec 27, 1993
From: GRUENENFELDER, PIUS
To: BALZERS AKTIENGESELLSCHAFT
Reel/Frame 006841/0839 →
Assignment of Assignor's Interest
Jun 9, 1994
From: TURLOT, EMMANUEL; EMERAUD, THIERRY; SCHMITT, JACQUES
To: BALZERS AKTIENGESELLSCHAFT
Reel/Frame 007051/0623 →
Assignment of Assignor's Interest
Jul 5, 1994
From: SCHMITT, JACQUES; MURALT, PAUL-RENE
To: BALZERS AKTIENGESELLSCHAFT
Reel/Frame 007069/0852 →
Assignment of Assignor's Interest
Mar 22, 1996
From: SIGNER, HANS
To: BALZERS AKTIENGESELLSCHAFT
Reel/Frame 007923/0209 →
Assignment of Assignor's Interest
Aug 8, 1996
From: GALDOS, AITOR; WAGNER, RUDOLF; BRUDERER, MARKUS
To: BALZERS AKTIENGESELLSCHAFT
Reel/Frame 008305/0945 →
Assignment of Assignor's Interest
Feb 6, 1998
From: SCHMITT, JACQUES; TURLOT, EMMANUEL; LEBLANC, F.
To: BALZERS AKTIENGESELLSCHAFT
Reel/Frame 008985/0399 →
Assignment of Assignor's Interest
May 27, 1998
From: HAAG, WALTER; GRUNENFELDER, PIUS; SCHWENDENER, URS; SCHLEGEL, MARKUS
To: BALZERS HOCHVACUUM AG
Reel/Frame 009205/0270 →
Assignment of Assignor's Interest
Aug 28, 1998
From: TURLOT, EMMANUEL; SCHMITT, JACQUES; GROUSSET, PHILIPPE
To: BALZERS HOCHVAKUUM AG
Reel/Frame 009420/0725 →
Assignment of Assignor's Interest
Dec 15, 1999
From: SCHMITT, JACQUES
To: BALZERS AKTIENGESELLSCHAFT
Reel/Frame 010448/0997 →
Assignment of Assignor's Interest
Jan 21, 2000
From: PERRIN, JEROME; ELYAAKOUBI, MUSTAPHA; SCHMITT, JACQUES
To: BALZERS AG
Reel/Frame 010538/0613 →
Assignment of Assignor's Interest
Sep 15, 2000
From: TURLOT, EMMANUEL; CHEVRIER, JEAN-BAPTISTE; SCHMITT, JACQUET; BARREIRO, JEAN
To: BALZERS AKTIENGESELLSCHAFT
Reel/Frame 011073/0862 →
Assignment of Assignor's Interest
Nov 22, 2000
From: WAGNER, RUDOLF
To: UNAXIS TRADING AG
Reel/Frame 011301/0367 →
Change of Name
Dec 6, 2000
From: BALZERS AKTIENGESELLSCHAFT
To: UNAXIS BALZERS AKTIENGESELLSCHAFT
Reel/Frame 011356/0829 →
Assignment of Assignor's Interest
Jan 3, 2002
From: DESCHAMPS, ARNAUD; MUELLER, WILLI; RHYNER, STEPHAN; GALDOS, AITOR
To: BALZERS HOCHVAKUUM AG
Reel/Frame 012427/0050 →
Change of Name
Jan 5, 2011
From: BALZERS AKTIENGESELLSCHAFT
To: OC OERLIKON BALZERS AG
Reel/Frame 025590/0566 →
Change of Name
Jan 5, 2011
From: BALZERS HOCHVACUUM AG
To: OERLIKON TRADING AG, TRUEBBACH
Reel/Frame 025588/0646 →
Change of Name
Jan 5, 2011
From: UNAXIS TRADING AG
To: OERLIKON TRADING AG, TRUEBBACH
Reel/Frame 025588/0507 →
Assignment of Assignor's Interest
Feb 2, 2011
From: OC OERLIKON BALZERS AG
To: OERLIKON SOLAR AG, TRUEBBACH
Reel/Frame 025732/0470 →
Assignment of Assignor's Interest
Feb 2, 2011
From: OERLIKON TRADING AG, TRUEBBACH
To: OERLIKON SOLAR AG, TRUEBBACH
Reel/Frame 025732/0707 →
Change of Name
Oct 26, 2011
From: BALZERS HOCHVAKUUM AG
To: OERLIKON TRADING AG, TRUBBACH
Reel/Frame 027121/0835 →
Change of Name
Oct 26, 2011
From: BALZERS AKTIENGESELLSCHAFT; UNAXIS BALZERS AKTIENGESELLSCHAFT
To: OC OERLIKON BALZERS AG
Reel/Frame 027120/0953 →
Assignment of Assignor's Interest
Oct 27, 2011
From: OERLIKON TRADING AG, TRUEBBACH
To: OERLIKON SOLAR AG, TRUEBBACH
Reel/Frame 027130/0509 →
Assignment of Assignor's Interest
Oct 27, 2011
From: OC OERLIKON BALZERS AG
To: OERLIKON SOLAR AG, TRUEBBACH
Reel/Frame 027130/0653 →
License
Aug 1, 2014
From: TEL SOLAR AG
To: OC OERLIKON BALZERS AG
Reel/Frame 033459/0821 →
Assignment of Assignor's Interest
Sep 25, 2019
From: TEL SOLAR AG IN LIQUIDATION (FORMALLY KNOWN AS TEL SOLAR AG)
To: EVATEC AG
Reel/Frame 050479/0960 →