Method for producing semi-conducting devices and devices obtained with this method
View Patent ↗A semi-conducting device has at least one layer doped with a doping agent and a layer of another type deposited on the doped layer in a single reaction chamber. An operation for avoiding the contamination of the other layer by the doping agent separates the steps of depositing each of the layers.
1. A method for producing a semi-conducting device comprising at least a first plasma-deposited layer doped with a doping agent and a second plasma-deposited layer deposited on said first doped layer in a single reaction chamber, wherein the deposition steps of said first and second layers are separated by an operation for avoiding the contamination of said second layer by the doping agent, wherein said operation comprises a dosing of the reaction chamber, having said first doped layer therein, with a vapour or gas comprising ammonia, hydrazine or a volatile organic amine without plasma, wherein as result of said dosing, residual doping agent from the deposition of said first layer that is present on initial surface of said reaction chamber is transferred into stable chemical compounds unable to desorb.
2. The method of claim 1 , wherein the doped layer is a p-doped layer.
3. The method of claim 1 , wherein the doped layer is a n-doped layer.
4. The method of claim 2 , wherein said operation is followed by the deposition of a buffer layer on the p-layer.
5. The method of claim 1 , wherein said dosing is followed by a pumping at high vacuum and between 100 and 350° C. for less than 5 minutes.
6. The method of claim 1 , wherein said dosing is performed at around 0.05 to 100 mbar and between 100 and 350° C. for less than 10 minutes.
7. The method of claim 1 , wherein said doping agent comprises trimethylboron.