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Patent Application Utility PCT National Stage
App. No. 13/002,572 · Confirmation No. 1711

REMOTE PLASMA CLEANING METHOD AND APPARATUS FOR APPLYING SAID METHOD

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2015-07-15 ABN Abandonment 2 View
2015-01-02 CTNF Non-Final Rejection 12 View
2015-01-02 892 List of references cited by examiner 1 View
2015-01-02 SRFW Search information including classification, databases and other search related notes 1 View
2015-01-02 1449 List of References cited by applicant and considered by examiner 4 View
2015-01-02 FWCLM Index of Claims 1 View
2014-08-27 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2014-08-27 FOR Foreign Reference 42 View
2014-08-27 FOR Foreign Reference 90 View
2014-08-27 FOR Foreign Reference 28 View
2014-08-27 FOR Foreign Reference 72 View
2014-08-27 FOR Foreign Reference 21 View
2014-08-27 N417 Electronic Filing System Acknowledgment Receipt 3 View
2014-08-05 RCEX Request for Continued Examination (RCE) 3 View
2014-08-05 WFEE Fee Worksheet (SB06) 2 View
2014-08-05 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-07-10 CTAV Advisory Action (PTOL-303) 3 View
2014-07-10 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2014-06-27 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2014-06-27 CLM Claims 2 View
2014-06-27 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2014-06-27 A.NE.AFCP After Final Consideration Program Request 2 View
2014-06-27 WFEE Fee Worksheet (SB06) 2 View
2014-06-27 N417 Electronic Filing System Acknowledgment Receipt 3 View
2014-06-27 WFEE Fee Worksheet (SB06) 1 View
2014-02-27 CTFR Final Rejection 8 View
2014-02-27 SRFW Search information including classification, databases and other search related notes 1 View
2014-02-27 FWCLM Index of Claims 1 View
2013-12-05 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2013-12-05 CLM Claims 2 View
2013-12-05 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2013-12-05 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-12-05 WFEE Fee Worksheet (SB06) 1 View
2013-09-05 CTNF Non-Final Rejection 10 View
2013-09-05 892 List of references cited by examiner 1 View
2013-09-05 FWCLM Index of Claims 1 View
2013-09-05 1449 List of References cited by applicant and considered by examiner 2 View
2013-09-05 1449 List of References cited by applicant and considered by examiner 2 View
2013-09-05 SRFW Search information including classification, databases and other search related notes 1 View
2013-05-23 ELC. Response to Election / Restriction Filed 1 View
2013-05-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-05-14 CTRS Requirement for Restriction/Election 5 View
2013-05-14 FWCLM Index of Claims 1 View
2011-08-25 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2011-08-25 NTC.PUB Notice of Publication 1 View
2011-05-31 APP.FILE.REC Filing Receipt 3 View
2011-05-17 WFEE Fee Worksheet (SB06) 1 View
2011-05-17 M903 Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed 2 View
2011-05-17 APP.FILE.REC Filing Receipt 3 View
2011-05-05 APP.FILE.REC Filing Receipt 3 View
2011-05-04 CFILE Request for Corrected Filing Receipt 1 View
2011-05-04 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-04-28 M903 Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed 2 View
2011-04-28 WFEE Fee Worksheet (SB06) 1 View
2011-04-28 APP.FILE.REC Filing Receipt 3 View
2011-04-21 OATH Oath or Declaration filed 9 View
2011-04-21 LET. Miscellaneous Incoming Letter 1 View
2011-04-21 ADS Application Data Sheet 5 View
2011-04-21 WFEE Fee Worksheet (SB06) 2 View
2011-04-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-02-04 M905 Notice of DO/EO Missing Requirements Mailed 2 View
2011-02-04 WFEE Fee Worksheet (SB06) 1 View
2011-02-04 WCLM Claims Worksheet (PTO-2022) 1 View
2011-01-31 A.PE Preliminary Amendment 1 View
2011-01-31 CLM Claims 2 View
2011-01-31 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2011-01-31 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2011-01-31 TRAN.LET Transmittal Letter 2 View
2011-01-31 371P Documents submitted with 371 (National Stage) Applications 6 View
2011-01-31 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-01-31 WFEE Fee Worksheet (SB06) 1 View
2011-01-04 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2011-01-04 TRAN.LET Transmittal Letter 2 View
2011-01-04 FOR Foreign Reference 19 View
2011-01-04 FOR Foreign Reference 36 View
2011-01-04 FOR Foreign Reference 84 View
2011-01-04 FOR Foreign Reference 12 View
2011-01-04 371P Documents submitted with 371 (National Stage) Applications 3 View
2011-01-04 WFEE Fee Worksheet (SB06) 2 View
2011-01-04 N417 Electronic Filing System Acknowledgment Receipt 3 View
2011-01-04 ADS Application Data Sheet 5 View
2011-01-04 SPEC Specification 5 View
2011-01-04 CLM Claims 2 View
2011-01-04 ABST Abstract 1 View
2011-01-04 DRW Drawings-only black and white line drawings 1 View
2011-01-04 ABST Abstract 1 View
2011-01-04 SPEC Specification 5 View
2011-01-04 CLM Claims 2 View
2011-01-04 DRW Drawings-only black and white line drawings 1 View
2011-01-04 FRPR Certified Copy of Foreign Priority Application 13 View
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Quick Facts
App. No.
13/002,572
Filed
2011-04-21
Effective Filing
2011-01-04
Pub. No.
US20110203610A1
Art Unit
1711