Granted Patent
Utility
US 5,422,139 · App. 08/067,392
Method for a reactive surface treatment of a workpiece and a treatment chamber for practicing such method
Inventor:
Heinrich Fischer
Patented Case
View Patent ↗
Granted: Jun 6, 1995
Filed: May 25, 1993
Inventor
Heinrich Fischer
Assignee (at issue)
Balzers Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.