Patent Application
Utility
App. No. 09/892,723
· Confirmation No. 5710
APPARATUS AND METHOD FOR PLASMA ETCHING
Inventor:
Mitsuhiro Ohkuni
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-06-28 | TRNA |
Transmittal of New Application | 4 | View | |
| 2001-06-28 | A.PE |
Preliminary Amendment | 6 | View | |
| 2001-06-28 | SPEC |
Specification | 32 | View | |
| 2001-06-28 | CLM |
Claims | 2 | View | |
| 2001-06-28 | ABST |
Abstract | 1 | View | |
| 2001-06-28 | DRW |
Drawings-only black and white line drawings | 17 | View | |
| 2001-06-28 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Mitsuhiro Ohkuni
Nara, JAPAN
Attorneys & Agents of Record
Classification
USPC
156/345
H01J37/32834
H10P50/287
H10P50/268
H01J37/321
Prosecution
- Examiner
- DANG, THI D
- Art Unit
- 1763
- Docket No.
- 60188-074
- Confirmation No.
- 5710
Foreign Priority
10-044817
·
1998-02-26
·
JAPAN
10-091132
·
1998-04-03
·
JAPAN
Publication
- Pub. No.
- US20020033231A1
- Pub. Date
- 2002-03-21
Patent Term Adjustment
0days
MERGER
Recorded 2002-10-25
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Quick Facts
- App. No.
- 09/892,723
- Filed
- 2001-06-28
- Granted
- 2002-06-25
- Pub. No.
- US20020033231A1
- Examiner
- DANG, THI D
- Art Unit
- 1763
- PTA
- 0 days
External Links