IP Library Granted Patent US 6,653,267
Granted Patent Utility
US 6,653,267 · Confirmation No. 6100

AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING USED FOR POLISHING OF COPPER

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Code Description Pages PDF
2017-09-28 OATH Oath or Declaration filed 4 View
2003-10-17 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-10-17 FOR Foreign Reference 52 View
2003-10-17 FOR Foreign Reference 28 View
2003-09-17 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-06-29 TRNA Transmittal of New Application 2 View
2001-06-29 ADS Application Data Sheet 3 View
2001-06-29 SPEC Specification 23 View
2001-06-29 CLM Claims 3 View
2001-06-29 ABST Abstract 1 View
2001-06-29 OATH Oath or Declaration filed 4 View
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Quick Facts
Patent No.
US 6,653,267
App. No.
09/893,961
Filed
2001-06-29
Granted
2003-11-25
Pub. No.
US20020016275A1
Art Unit
1751
PTA
0 days