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App. No. 09/904,919 · Confirmation No. 4702

GAS CLUSTER ION BEAM SIZE DIAGNOSTICS AND WORKPIECE PROCESSING

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2004-09-17 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-08-25 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-08-25 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-08-25 FWCLM Index of Claims 1 View
2004-08-25 SRFW Search information including classification, databases and other search related notes 1 View
2004-08-25 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-08-25 BIB Bibliographic Data Sheet 1 View
2004-08-20 SRNT Examiner's search strategy and results 3 View
2004-08-13 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-08-13 CLM Claims 7 View
2004-08-13 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-08-13 LET. Miscellaneous Incoming Letter 1 View
2004-08-13 DIST Terminal Disclaimer Filed 2 View
2004-06-21 WFEE Fee Worksheet (SB06) 1 View
2004-06-04 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-06-04 CLM Claims 7 View
2004-06-04 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2004-06-04 136A Authorization for Extension of Time all replies 1 View
2004-06-04 LET. Miscellaneous Incoming Letter 2 View
2004-01-02 CTNF Non-Final Rejection 7 View
2004-01-02 892 List of references cited by examiner 1 View
2003-10-01 LET. Miscellaneous Incoming Letter 2 View
2003-10-01 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-10-01 CLM Claims 7 View
2003-10-01 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-10-01 136A Authorization for Extension of Time all replies 1 View
2003-03-31 CTNF Non-Final Rejection 6 View
2003-03-31 892 List of references cited by examiner 1 View
2003-03-31 1449 List of References cited by applicant and considered by examiner 1 View
2003-03-13 SRNT Examiner's search strategy and results 1 View
2002-01-07 PEFR Applicant Response to Pre-Exam Formalities Notice 5 View
2002-01-07 OATH Oath or Declaration filed 2 View
2002-01-07 PA.. Power of Attorney 2 View
2001-12-03 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2001-12-03 FOR Foreign Reference 6 View
2001-09-17 SRNT Examiner's search strategy and results 2 View
2001-08-27 PEFN Pre-Exam Formalities Notice 1 View
2001-07-13 TRNA Transmittal of New Application 2 View
2001-07-13 ADS Application Data Sheet 2 View
2001-07-13 SPEC Specification 26 View
2001-07-13 CLM Claims 8 View
2001-07-13 ABST Abstract 1 View
2001-07-13 DRW Drawings-only black and white line drawings 19 View
2001-07-13 OATH Oath or Declaration filed 2 View
2001-07-13 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-07-13 SRFW Search information including classification, databases and other search related notes 1 View
2001-07-13 FWCLM Index of Claims 1 View
2001-07-13 TRNA Transmittal of New Application 3 View
2001-07-13 DRW Drawings-only black and white line drawings 19 View
2001-07-13 SPEC Specification 25 View
2001-07-13 CLM Claims 8 View
2001-07-13 ABST Abstract 1 View
2001-07-13 OATH Oath or Declaration filed 2 View
2001-07-13 WFEE Fee Worksheet (SB06) 1 View
2001-07-13 WFEE Fee Worksheet (SB06) 2 View
2001-07-13 WCLM Claims Worksheet (PTO-2022) 1 View
2001-07-13 ADS Application Data Sheet 2 View
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Quick Facts
App. No.
09/904,919
Filed
2001-07-13
Granted
2004-12-14
Pub. No.
US20020070361A1
Art Unit
2853
PTA
-206 days