Patent Assignment
Reel/Frame 023044/0424
Assignment of Assignor's Interest
Recorded: 2009-08-04
Received: 2009-08-04
Pages: 13
Assignor
JDSU OPTICAL CORPORATION
Executed: 2006-05-24
Assignee
EPION CORPORATION, A DELAWARE CORPORATION
37 MANNING ROAD, BILLERICA, MA, 01821, UNITED STATES
Covered Properties
(9)
System for and Method of Gas Cluster Ion Beam Processing
Application:
10/667,006 →
Gcib Processing to Improve Interconnection Vias and Improved Interconnection Via
Application:
10/269,605 →
Charging Control and Dosimetry System for Gas Cluster Ion Beam
Application:
10/036,179 →
Adaptive Gcib for Smoothing Surfaces
Application:
09/999,099 →
Enhanced Etching/Smoothing of Dielectric Surfaces
Application:
09/969,559 →
Gas Cluster Ion Beam Size Diagnostics and Workpiece Processing
Application:
09/904,919 →
Gas Cluster Ion Beam Size Diagnostics and Workpiece Processing
Application:
09/905,536 →
System and Method for Adjusting the Properties of a Device by Gcib Processing
Application:
09/842,540 →
Detector and Method for Cluster Ion Beam Diagnostics
Application:
09/811,904 →