IP Library Patent Application 09905536
Patent Application Utility
App. No. 09/905,536 · Confirmation No. 3492

GAS CLUSTER ION BEAM SIZE DIAGNOSTICS AND WORKPIECE PROCESSING

Inventor: Jerald P. Dykstra
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2007-05-31 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2007-05-31 FOR Foreign Reference 53 View
2007-05-31 N417 Electronic Filing System Acknowledgment Receipt 3 View
2007-05-31 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2004-05-10 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-02-20 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-02-20 FWCLM Index of Claims 1 View
2004-02-20 SRFW Search information including classification, databases and other search related notes 1 View
2004-02-20 NOA Notice of Allowance and Fees Due (PTOL-85) 2 View
2004-02-20 NOA Notice of Allowance and Fees Due (PTOL-85) 1 View
2004-02-17 WCLM Claims Worksheet (PTO-2022) 1 View
2004-02-17 WFEE Fee Worksheet (SB06) 1 View
2004-01-02 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2004-01-02 CLM Claims 16 View
2004-01-02 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-09-30 CTNF Non-Final Rejection 7 View
2003-09-30 892 List of references cited by examiner 1 View
2003-09-23 SRNT Examiner's search strategy and results 1 View
2003-08-01 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-08-01 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2003-08-01 XT/ Extension of Time 1 View
2003-08-01 LET. Miscellaneous Incoming Letter 2 View
2003-03-31 CTNF Non-Final Rejection 8 View
2003-03-31 892 List of references cited by examiner 1 View
2003-03-31 1449 List of References cited by applicant and considered by examiner 2 View
2002-06-04 FRPR Certified Copy of Foreign Priority Application 34 View
2002-01-30 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-01-30 FOR Foreign Reference 1 View
2002-01-30 FOR Foreign Reference 5 View
2002-01-30 FOR Foreign Reference 6 View
2002-01-10 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2001-10-12 PEFR Applicant Response to Pre-Exam Formalities Notice 5 View
2001-10-12 OATH Oath or Declaration filed 2 View
2001-10-12 PA.. Power of Attorney 1 View
2001-08-28 PEFN Pre-Exam Formalities Notice 1 View
2001-08-17 ADS Application Data Sheet 3 View
2001-08-17 ADS Application Data Sheet 2 View
2001-07-13 TRNA Transmittal of New Application 2 View
2001-07-13 ADS Application Data Sheet 2 View
2001-07-13 SPEC Specification 18 View
2001-07-13 CLM Claims 16 View
2001-07-13 ABST Abstract 1 View
2001-07-13 DRW Drawings-only black and white line drawings 8 View
2001-07-13 OATH Oath or Declaration filed 2 View
2001-07-13 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-07-13 SRFW Search information including classification, databases and other search related notes 1 View
2001-07-13 FWCLM Index of Claims 1 View
2001-07-13 TRNA Transmittal of New Application 2 View
2001-07-13 DRW Drawings-only black and white line drawings 8 View
2001-07-13 SPEC Specification 18 View
2001-07-13 CLM Claims 16 View
2001-07-13 ABST Abstract 1 View
2001-07-13 OATH Oath or Declaration filed 2 View
2001-07-13 WFEE Fee Worksheet (SB06) 1 View
2001-07-13 WFEE Fee Worksheet (SB06) 1 View
2001-07-13 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
App. No.
09/905,536
Filed
2001-07-13
Granted
2004-08-03
Pub. No.
US20020036261A1
Art Unit
2853
PTA
-35 days