Patent Application
Utility
App. No. 09/907,595
· Confirmation No. 1691
METHOD FOR REMOVING CONTAMINANT COMPOUNDS RESPECTIVELY HAVING BENZENE RING THEREIN FROM SURFACE OF SI LAYER AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE INCLUDING STEP FOR REMOVING CONTAMINANT COMPOUNDS
Inventor:
Masahiro Takahashi
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-06-27 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-06-27 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2001-07-19 | TRNA |
Transmittal of New Application | 4 | View | |
| 2001-07-19 | A.PE |
Preliminary Amendment | 3 | View | |
| 2001-07-19 | SPEC |
Specification | 19 | View | |
| 2001-07-19 | CLM |
Claims | 5 | View | |
| 2001-07-19 | ABST |
Abstract | 1 | View | |
| 2001-07-19 | DRW |
Drawings-only black and white line drawings | 14 | View | |
| 2001-07-19 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Masahiro Takahashi
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/725
H10D64/01346
H10D64/68
H10P70/12
H10D64/01342
Y10S438/906
Prosecution
- Examiner
- COLEMAN, WILLIAM D
- Art Unit
- 2895
- Docket No.
- TNK.024D
- Confirmation No.
- 1691
Foreign Priority
10-90366
·
1998-04-02
·
JAPAN
Publication
- Pub. No.
- US20010044215A1
- Pub. Date
- 2001-11-22
Patent Term Adjustment
-178days
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Quick Facts
- App. No.
- 09/907,595
- Filed
- 2001-07-19
- Granted
- 2003-09-23
- Pub. No.
- US20010044215A1
- Examiner
- COLEMAN, WILLIAM D
- Art Unit
- 2895
- PTA
- -178 days
External Links