IP Library Granted Patent US 6,402,601
Granted Patent Utility
US 6,402,601 · Confirmation No. 9269

WEB-FORMAT PLANARIZING MACHINES AND METHODS FOR PLANARIZING MICROELECTRONIC SUBSTRATE ASSEMBLIES

⬇ PDF
Code Description Pages PDF
2001-07-17 TRNA Transmittal of New Application 7 View
2001-07-17 ADS Application Data Sheet 2 View
2001-07-17 A.PE Preliminary Amendment 26 View
2001-07-17 SPEC Specification 13 View
2001-07-17 CLM Claims 23 View
2001-07-17 ABST Abstract 1 View
2001-07-17 DRW Drawings-only black and white line drawings 14 View
2001-07-17 OATH Oath or Declaration filed 8 View
2001-07-17 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
Patent No.
US 6,402,601
App. No.
09/907,834
Filed
2001-07-17
Granted
2002-06-11
Pub. No.
US20010051495A1
Art Unit
3723
PTA
-96 days