IP Library › Granted Patent US 6,562,182
Granted Patent Utility
US 6,562,182 · Confirmation No. 3031

METHOD AND APPARATUS FOR ENDPOINTING A CHEMICAL-MECHANICAL PLANARIZATION PROCESS

Inventor: Vishnu K. Agarwal
Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-07-20 TRNA Transmittal of New Application 3 View
2001-07-20 ADS Application Data Sheet 1 View
2001-07-20 A.PE Preliminary Amendment 2 View
2001-07-20 SPEC Specification 17 View
2001-07-20 CLM Claims 15 View
2001-07-20 ABST Abstract 1 View
2001-07-20 DRW Drawings-only black and white line drawings 5 View
2001-07-20 OATH Oath or Declaration filed 9 View
2001-07-20 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
Patent No.
US 6,562,182
App. No.
09/909,579
Filed
2001-07-20
Granted
2003-05-13
Pub. No.
US20020019067A1
Art Unit
1763
PTA
-8 days