Granted Patent
Utility
US 6,517,668
· Confirmation No. 2991
METHOD AND APPARATUS FOR ENDPOINTING A CHEMICAL-MECHANICAL PLANARIZATION PROCESS
Inventor:
Vishnu K. Agarwal
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-07-20 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-07-20 | ADS |
Application Data Sheet | 1 | View | |
| 2001-07-20 | A.PE |
Preliminary Amendment | 2 | View | |
| 2001-07-20 | SPEC |
Specification | 17 | View | |
| 2001-07-20 | CLM |
Claims | 15 | View | |
| 2001-07-20 | ABST |
Abstract | 1 | View | |
| 2001-07-20 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2001-07-20 | OATH |
Oath or Declaration filed | 10 | View |
Inventors
Vishnu K. Agarwal
Boise, ID
Attorneys & Agents of Record
Classification
USPC
156/345
B24B37/013
H10P52/402
Prosecution
- Examiner
- GOUDREAU, GEORGE A
- Art Unit
- 1763
- Customer No.
- 27076
- Docket No.
- 500431.05
- Confirmation No.
- 2991
Publication
- Pub. No.
- US20010042596A1
- Pub. Date
- 2001-11-22
Patent Term Adjustment
-120days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2016-11-10
from
AGARWAL, VISHNU K.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2016-11-08
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Quick Facts
- Patent No.
- US 6,517,668
- App. No.
- 09/910,356
- Filed
- 2001-07-20
- Granted
- 2003-02-11
- Pub. No.
- US20010042596A1
- Examiner
- GOUDREAU, GEORGE A
- Art Unit
- 1763
- PTA
- -120 days
External Links