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US 6,776,871 · Confirmation No. 3239

METHOD AND APPARATUS FOR ENDPOINTING A CHEMICAL-MECHANICAL PLANARIZATION PROCESS

Inventor: Vishnu K. Agarwal
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2004-04-01 SRFW Search information including classification, databases and other search related notes 2 View
2004-01-26 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-01-26 CLM Claims 4 View
2004-01-26 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2003-11-14 CTNF Non-Final Rejection 8 View
2003-11-14 SRFW Search information including classification, databases and other search related notes 1 View
2003-11-14 FWCLM Index of Claims 1 View
2003-10-10 RCEX Request for Continued Examination (RCE) 3 View
2003-09-23 CTAV Advisory Action (PTOL-303) 2 View
2003-08-22 A.NE Response After Final Action 2 View
2003-08-22 CLM Claims 4 View
2003-08-22 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-06-18 CTFR Final Rejection 7 View
2003-06-18 892 List of references cited by examiner 1 View
2003-06-11 SRNT Examiner's search strategy and results 1 View
2003-04-14 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-04-14 CLM Claims 7 View
2003-04-14 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-03-10 CTNF Non-Final Rejection 4 View
2003-02-24 LET. Miscellaneous Incoming Letter 3 View
2003-02-24 A.NE Response After Final Action 1 View
2003-02-24 CLM Claims 1 View
2003-02-24 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2002-10-17 CTFR Final Rejection 7 View
2002-10-17 1449 List of References cited by applicant and considered by examiner 3 View
2002-10-10 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2002-09-09 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2002-07-23 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2002-07-23 CLM Claims 3 View
2002-07-23 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2002-07-05 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2002-05-23 C.AD Change of Address 1 View
2002-04-16 CTNF Non-Final Rejection 7 View
2002-04-16 1449 List of References cited by applicant and considered by examiner 1 View
2002-04-16 892 List of references cited by examiner 1 View
2002-04-12 SRNT Examiner's search strategy and results 1 View
2002-01-26 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2002-01-23 AF/D Affidavit-submitted prior to Mar 15, 2013 12 View
2002-01-23 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2002-01-23 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2001-09-28 CTNF Non-Final Rejection 7 View
2001-09-28 1449 List of References cited by applicant and considered by examiner 1 View
2001-09-28 892 List of references cited by examiner 1 View
2001-09-24 SRNT Examiner's search strategy and results 2 View
2001-07-20 TRNA Transmittal of New Application 3 View
2001-07-20 ADS Application Data Sheet 1 View
2001-07-20 A.PE Preliminary Amendment 2 View
2001-07-20 SPEC Specification 17 View
2001-07-20 CLM Claims 15 View
2001-07-20 ABST Abstract 1 View
2001-07-20 DRW Drawings-only black and white line drawings 5 View
2001-07-20 OATH Oath or Declaration filed 10 View
2001-07-20 FWCLM Index of Claims 1 View
2001-07-20 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-07-20 SRFW Search information including classification, databases and other search related notes 1 View
2001-07-20 TRNA Transmittal of New Application 4 View
2001-07-20 ADS Application Data Sheet 1 View
2001-07-20 A.PE Preliminary Amendment 1 View
2001-07-20 CLM Claims 1 View
2001-07-20 SPEC Specification 17 View
2001-07-20 CLM Claims 15 View
2001-07-20 ABST Abstract 1 View
2001-07-20 DRW Drawings-only black and white line drawings 5 View
2001-07-20 OATH Oath or Declaration filed 10 View
2001-07-20 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2001-07-20 FOR Foreign Reference 5 View
2001-07-20 FOR Foreign Reference 25 View
2001-07-20 FOR Foreign Reference 18 View
2001-07-20 WFEE Fee Worksheet (SB06) 1 View
2001-07-20 WFEE Fee Worksheet (SB06) 1 View
2001-07-20 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
Patent No.
US 6,776,871
App. No.
09/910,661
Filed
2001-07-20
Granted
2004-08-17
Pub. No.
US20020014310A1
Art Unit
1763
PTA
-172 days