Electro-optical apparatus, electronic device, substrate for use in an electro-optical apparatus, method of producing a substrate for use in an electro-optical apparatus, and light shielding film
The invention provides a light shielding film having excellent capability of shielding light. The light shielding film includes a barrier layer formed of a material selected from the group including a refractory nitride compound, silicon compound, tungsten compound, tungsten, and silicon, and also includes a metal layer formed of a material selected from the group including a metal in the form of a simple substance or a metal compound, whose high capability of shielding light is degraded when being oxidized.
1. An electro-optical apparatus, comprising:
a pair of substrates;
an electro-optical material disposed between the pair of substrates;
a switching element disposed on one of said substrates; and
a light shielding film disposed at a location that opposes said switching element, and that is on said one of said substrates, said light shielding film including:
a metal layer formed of a refractory metal in the form of a simple substance or a refractory metal compound; and
barrier layers disposed on at least one surface of said metal layer, such that side faces of a lower barrier layer and side faces of the metal layer are covered with an upper barrier layer, said barrier layers being formed of a refractory metal or a refractory metal compound containing no oxygen.
2. The electro-optical apparatus according to claim 1 , the metal layer of said light shielding film including a light shielding metal and a light-absorbable metal layer.
3. The electro-optical apparatus according to claim 1 , said light shielding film being connected to a fixed potential.
4. The electro-optical apparatus according to claim 1 , said light barriers layer being formed of a material selected from the group including a nitride compound, a silicon compound, a tungsten compound, tungsten, and silicon.
5. The electro-optical apparatus according to claim 1 , said barrier layers being formed of WSi.
6. The electro-optical apparatus according to claim 5 , said metal layer being formed of Ti.
7. The electro-optical apparatus according to claim 1 , said barrier layers being formed of tungsten.
8. The electro-optical apparatus according to claim 1 , further comprising:
a barrier layer formed by depositing a film of a refractory metal or a refractory metal compound containing no oxygen prior to forming the metal layer.
9. The electro-optical apparatus according to claim 1 , including an insulating film formed by depositing an insulating material on said barrier layer, said forming the insulating film including performing heat treatment at a temperature in the range from 500° C. to 1100° C.
10. An electro-optical apparatus, comprising:
a pair of substrates;
an electro-optical material disposed between the pair of substrates;
a switching element disposed above one of the substrates;
a light shielding film disposed at a location opposing the switching element; and
an insulating film between the light shielding film and the switching element, the light shielding film including:
a metal layer formed of a refractory metal in the form of a simple substance or a refractory metal compound; and
barrier layers disposed on upper and lower surfaces of the metal layer, the barrier layers being formed of a refractory metal or a refractory metal compound containing no oxygen, the thickness of the barrier layer formed on the upper surface of the metal layer being greater than a thickness of the barrier layer formed on the lower surface of the metal layer.