IP Library › Granted Patent US 6,689,682
Granted Patent Utility
US 6,689,682 · Confirmation No. 3663

MULTILAYER ANTI-REFLECTIVE COATING FOR SEMICONDUCTOR LITHOGRAPHY

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 Code Description Pages PDF
2020-03-06 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2020-03-06 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2020-02-25 PA.. Power of Attorney 1 View
2020-02-25 R3.73 Assignee showing of ownership per 37 CFR 3.73 7 View
2020-02-25 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-07-28 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2003-12-15 LET. Miscellaneous Incoming Letter 3 View
2003-12-15 DRW Drawings-only black and white line drawings 3 View
2001-08-07 TRNA Transmittal of New Application 2 View
2001-08-07 SPEC Specification 8 View
2001-08-07 CLM Claims 3 View
2001-08-07 ABST Abstract 1 View
2001-08-07 DRW Drawings-only black and white line drawings 3 View
2001-08-07 OATH Oath or Declaration filed 3 View
2001-08-07 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
Patent No.
US 6,689,682
App. No.
09/924,670
Filed
2001-08-07
Granted
2004-02-10
Art Unit
2825
PTA
-58 days