Granted Patent
Utility
US 6,602,436
· Confirmation No. 3130
CHEMICAL MECHANICAL PLANARIZATION OF METAL SUBSTRATES
Inventors
Glenn C. Mandigo
Boothwyn, PA
Ross E. Barker II
Newark, DE
Craig D. Lack
Wilmington, DE
Ian G. Sullivan
Wilmington, DE
Wendy B. Goldberg
Wilmington, DE
Classification
USPC
438/698
H10P52/00
C09G1/02
B24B37/0056
B24B37/04
B24B37/044
Prosecution
- Examiner
- GOUDREAU, GEORGE A
- Art Unit
- 1763
- Docket No.
- 170US
- Confirmation No.
- 3130
Publication
- Pub. No.
- US20020058426A1
- Pub. Date
- 2002-05-16
Patent Term Adjustment
-70days
from
RODEL HOLDINGS, INC.
CHANGE OF NAME
Recorded 2004-06-15
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-01-10
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-01-10
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Quick Facts
- Patent No.
- US 6,602,436
- App. No.
- 09/925,209
- Filed
- 2001-08-09
- Granted
- 2003-08-05
- Pub. No.
- US20020058426A1
- Examiner
- GOUDREAU, GEORGE A
- Art Unit
- 1763
- PTA
- -70 days
External Links