Patent Application
Utility
App. No. 09/925,679
· Confirmation No. 3716
RESIST COMPOSITION AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE RESIST COMPOSITION
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-08-23 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-06-03 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-06-03 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 1 | View | |
| 2004-06-03 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-06-03 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-03-22 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 3 | View | |
| 2004-03-22 | CLM |
Claims | 5 | View | |
| 2004-03-22 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2003-12-23 | CTNF |
Non-Final Rejection | 5 | View | |
| 2003-12-23 | FWCLM |
Index of Claims | 1 | View | |
| 2003-12-23 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-12-01 | RCEX |
Request for Continued Examination (RCE) | 3 | View | |
| 2003-11-18 | CTAV |
Advisory Action (PTOL-303) | 3 | View | |
| 2003-11-18 | FWCLM |
Index of Claims | 1 | View | |
| 2003-11-18 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-10-29 | A.NE |
Response After Final Action | 1 | View | |
| 2003-10-29 | CLM |
Claims | 4 | View | |
| 2003-10-29 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2003-07-29 | CTFR |
Final Rejection | 6 | View | |
| 2003-07-29 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2003-06-09 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 2 | View | |
| 2003-06-09 | CLM |
Claims | 4 | View | |
| 2003-06-09 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2003-04-14 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2003-04-14 | FOR |
Foreign Reference | 16 | View | |
| 2003-04-14 | FOR |
Foreign Reference | 32 | View | |
| 2003-04-14 | FOR |
Foreign Reference | 10 | View | |
| 2003-03-07 | CTNF |
Non-Final Rejection | 7 | View | |
| 2003-03-07 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-03-07 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2003-01-13 | C.AD |
Change of Address | 1 | View | |
| 2001-11-14 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2001-11-14 | FOR |
Foreign Reference | 9 | View | |
| 2001-11-14 | FOR |
Foreign Reference | 30 | View | |
| 2001-11-14 | FOR |
Foreign Reference | 26 | View | |
| 2001-11-14 | FOR |
Foreign Reference | 12 | View | |
| 2001-11-14 | FOR |
Foreign Reference | 20 | View | |
| 2001-08-10 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-08-10 | SPEC |
Specification | 29 | View | |
| 2001-08-10 | CLM |
Claims | 5 | View | |
| 2001-08-10 | ABST |
Abstract | 1 | View | |
| 2001-08-10 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2001-08-10 | OATH |
Oath or Declaration filed | 4 | View | |
| 2001-08-10 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2001-08-10 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2001-08-10 | FWCLM |
Index of Claims | 1 | View | |
| 2001-08-10 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-08-10 | SPEC |
Specification | 29 | View | |
| 2001-08-10 | CLM |
Claims | 5 | View | |
| 2001-08-10 | ABST |
Abstract | 1 | View | |
| 2001-08-10 | OATH |
Oath or Declaration filed | 4 | View | |
| 2001-08-10 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2001-08-10 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2001-08-10 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2001-08-10 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2001-08-10 | FRPR |
Certified Copy of Foreign Priority Application | 50 | View |
Inventors
Minoru Toriumi
Kanagawa, JAPAN
Isao Satou
Kanagawa, JAPAN
Hiroyuki Watanabe
Kanagawa, JAPAN
Shunji Katai
Tokyo, JAPAN
Shintaro Suzuki
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
430/270.1
G03F7/038
G03F7/0045
G03F7/039
Y10S430/106
Y10S430/111
Prosecution
- Examiner
- CHU, JOHN S Y
- Art Unit
- 1752
- Customer No.
- 22428
- Docket No.
- 025311-0107
- Confirmation No.
- 3716
Foreign Priority
2000-244161
·
2000-08-11
·
JAPAN
Publication
- Pub. No.
- US20020022193A1
- Pub. Date
- 2002-02-21
Patent Term Adjustment
-35days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2005-09-23
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-08-07
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Quick Facts
- App. No.
- 09/925,679
- Filed
- 2001-08-10
- Granted
- 2004-10-12
- Pub. No.
- US20020022193A1
- Examiner
- CHU, JOHN S Y
- Art Unit
- 1752
- PTA
- -35 days
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