IP Library › Granted Patent US 6,537,368
Granted Patent Utility
US 6,537,368 · Confirmation No. 7251

IDEAL OXYGEN PRECIPITATING EPITAXIAL SILICON WAFERS AND OXYGEN OUT-DIFFUSION-LESS PROCESS THEREFOR

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2014-01-30 OATH Oath or Declaration filed 65 View
2013-12-26 OATH Oath or Declaration filed 29 View
2013-12-26 OATH Oath or Declaration filed 42 View
2008-05-29 PA.. Power of Attorney 3 View
2008-05-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2001-08-13 TRNA Transmittal of New Application 4 View
2001-08-13 ADS Application Data Sheet 2 View
2001-08-13 SPEC Specification 26 View
2001-08-13 CLM Claims 4 View
2001-08-13 ABST Abstract 1 View
2001-08-13 DRW Drawings-only black and white line drawings 9 View
2001-08-13 OATH Oath or Declaration filed 6 View
2001-08-13 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
Patent No.
US 6,537,368
App. No.
09/928,739
Filed
2001-08-13
Granted
2003-03-25
Pub. No.
US20020026893A1
Art Unit
1765
PTA
-64 days