Granted Patent
Utility
US 6,384,482
· Confirmation No. 8498
METHOD FOR FORMING A DIELECTRIC LAYER IN A SEMICONDUCTOR DEVICE BY USING ETCH STOP LAYERS
Inventors
Chih-Sheng Yang
Taipei, TAIWAN
Kuei-Chang Tsai
Ching Shui Chen, TAIWAN
Chih-Hung Shu
Chiung Lin Hsiang, TAIWAN
Yun-Liang Ouyang
Tan Shui Chen, TAIWAN
Attorneys & Agents of Record
Classification
USPC
257/758
H10W20/092
H10P95/062
Prosecution
- Examiner
- QUACH, TUAN N
- Art Unit
- 2814
- Customer No.
- 2292
- Docket No.
- 3626 - 0213P
- Confirmation No.
- 8498
Foreign Priority
089123321
·
2000-11-03
·
TAIWAN
Publication
- Pub. No.
- US20020055202A1
- Pub. Date
- 2002-05-09
Patent Term Adjustment
0days
No related applications found.
from
MOSEL VITELIC, INC.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-05-24
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-08-15
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Quick Facts
- Patent No.
- US 6,384,482
- App. No.
- 09/929,098
- Filed
- 2001-08-15
- Granted
- 2002-05-07
- Pub. No.
- US20020055202A1
- Examiner
- QUACH, TUAN N
- Art Unit
- 2814
- PTA
- 0 days
External Links