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App. No. 09/938,538 · Confirmation No. 2795

METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE WITH A DUAL INTERLAYER INSULATOR FILM OF BOROPHOSPOSILICATE GLASS TO PREVENT DIFFUSION OF PHOSPHORUS

Inventor: Syoji Yoh
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-08-27 TRNA Transmittal of New Application 4 View
2001-08-27 A.PE Preliminary Amendment 29 View
2001-08-27 SPEC Specification 11 View
2001-08-27 CLM Claims 3 View
2001-08-27 ABST Abstract 1 View
2001-08-27 DRW Drawings-only black and white line drawings 2 View
2001-08-27 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
09/938,538
Filed
2001-08-27
Granted
2002-10-22
Pub. No.
US20020037638A1
Art Unit
2824
PTA
0 days